Ag loading is known to enhance the photocatalytic performance of TiO₂; however, the correlation between Ag and the resulting changes in TiO₂ morphology and particle size is not well understood. A plasma-enhanced chemical vapor deposition (PECVD) and physical vapor deposition (PVD) were used to prepare Ag-TiO₂ nanoparticulate thin films; the prepared films were annealed at 500 C under N₂ atmosphere. The Ag content was adjusted by the furnace temperature of the PVD system. Well-dispersed Ag nanoparticles on the surface of TiO₂ nanoparticles were observed and analyzed using transmission electron microscopy (TEM). The morphology, particle size, and photocatalytic activity of the films were evidently affected by the Ag content. TEM images showed that the TiO₂ nanoparticle size increased with increasing Ag content. Evaluation of the photocatalytic activity based on the degradation of methylene blue under ultraviolet (UV) light irradiation demonstrated that an Ag content of 2.2 wt% yielded the highest photocatalytic activity (5.5 times higher than that seen in a pristine TiO₂ film). This fabrication method has advantages because it adds Ag in a more controlled manner compared to the liquid-phase methods. Furthermore, our fabrication method can provide a way to vary the Ag content while considering the relationship between the photocatalytic performance and the Ag content.

已知Ag的负载可以增强TiO ₂的光催化性能; 然而，人们对Ag与TiO ₂形态和粒径变化之间的相关性还不甚了解。用等离子体化学气相沉积（PECVD）和物理气相沉积（PVD）制备Ag-TiO ₂纳米颗粒薄膜。制备的膜在N ₂气氛下于500℃退火。通过PVD系统的炉温调节Ag含量。TiO ₂表面上分散良好的Ag纳米颗粒使用透射电子显微镜（TEM）观察和分析纳米颗粒。银的含量明显影响了薄膜的形貌，粒径和光催化活性。TEM图像表明，随着Ag含量的增加，TiO ₂纳米颗粒的尺寸增加。基于亚甲基蓝在紫外线（UV）照射下的降解对光催化活性的评估表明，Ag含量为2.2 wt％时产生的光催化活性最高（比原始TiO ₂高5.5倍）电影）。该制造方法具有优点，因为与液相方法相比，其以更加受控的方式添加Ag。此外，我们的制造方法可以提供一种改变Ag含量的方法，同时考虑光催化性能和Ag含量之间的关系。