Optics & Laser Technology ( IF 4.6 ) Pub Date : 2020-11-14 , DOI: 10.1016/j.optlastec.2020.106687 Xiaoduo Wang , Haibo Yu , Peiwen Li , Yuzhao Zhang , Yangdong Wen , Ye Qiu , Zhu Liu , YunPeng Li , Lianqing Liu
The unique advantages of surface and volume processing enabled by femtosecond laser fabrication makes it one of the most powerful tools for manufacturing optical and photonic devices based on complex three-dimensional structures with diverse functions. In this review, we focus on the recent advancements of femtosecond laser fabrication technologies and their versatile applications in different fields (e.g., nanotechnology, soft robotics, optics, and optoelectronics). Herein, the characteristics and development of laser direct writing, spatial light modulator-based fabrication and interference-based approaches are reviewed. Furthermore, typical applications and approaches related to the manufacturing of cutting-edge optical devices including microlens arrays, micro/nano gratings, photonic crystals, and optical fibers are summarized. Finally, the current challenges and emerging trends of this technology are discussed.
中文翻译:
飞秒激光加工方法及其在光学设备制造中的应用
飞秒激光制造可实现表面和体积处理的独特优势,使其成为基于具有多种功能的复杂三维结构制造光学和光子器件的最强大工具之一。在本文中,我们重点关注飞秒激光制造技术的最新进展及其在不同领域(例如,纳米技术,软机器人,光学和光电子学)的广泛应用。在本文中,回顾了激光直写,基于空间光调制器的制造和基于干涉的方法的特性和发展。此外,总结了与制造包括微透镜阵列,微/纳米光栅,光子晶体和光纤的尖端光学器件有关的典型应用和方法。最后,