NbTiNx and NbTiN₂₅-CHx coatings (where x indicates the nitrogen or acetylene flux rate) were deposited on SKH51 substrates by high-power impulse magnetron sputtering. The study comprised three stages. In the first stage, NbTiNx coatings with nitrogen flux rates varying from 0 to 50 sccm were deposited to determine the nitrogen flux rate which yielded the best mechanical and tribological properties. In the second stage, NbTiN₂₅-CHx coatings with acetylene flux rates varying in the range of 5-25 sccm were prepared using the optimal nitrogen flux rate determined in the first stage in an attempt to further improve the tribological performance. In the final stage, the NbTiN₂₅-CHx coating with the best tribological properties was deposited on micro-drills and used to perform a series of high-speed through-hole drilling tests under dry conditions using printed circuit board specimens. Among the various NbTiNx coatings, the NbTiN₂₅ coating showed an excellent adhesive strength (Lc > 100 N) and superior tribological properties. The NbTiN₂₅ coating was thus selected for further experimentation using various acetylene additions. The NbTiN₂₅-CH₂₅ coating was found to possess a sufficient carbon content (34.9 at.%) to produce a transition from a metal nitride crystalline (NbTiN₂₅) structure to a diamond-like carbon structure with a high sp² concentration. The coating exhibited a high hardness/elastic modulus ratio of 0.063 and an adhesive strength of Lc > 100 N. Consequently, a carbon-rich solid lubricant layer was formed at the contact interface under ball-on-disk sliding, which resulted in an excellent tribological performance. The NbTiN₂₅-CH₂₅ coating was thus chosen for deposition on micro-drills. The coating increased the lifetime of the micro-drill by around three times compared to that of an uncoated drill. Even after drilling 6000 holes, the holes showed an excellent quality with a low nail head ratio and surface roughness and a diameter error of less than 1.5%.

NbTiNx和NbTiN ₂₅ -CHx涂层（其中x表示氮或乙炔的通量速率）通过大功率脉冲磁控溅射法沉积在SKH51基板上。该研究包括三个阶段。在第一阶段，沉积NbTiNx涂层，其氮通量率在0到50 sccm之间变化，以确定氮通量率，从而产生最佳的机械和摩擦学性能。在第二阶段中，使用第一阶段中确定的最佳氮气流量来制备乙炔流量在5-25 sccm范围内变化的NbTiN ₂₅ -CHx涂层，以试图进一步改善摩擦性能。在最后阶段，NbTiN ₂₅具有最佳摩擦学性能的-CHx涂层沉积在微钻上，并用于在干燥条件下使用印刷电路板样品进行一系列高速通孔钻探测试。在各种NbTiNx涂层中，NbTiN ₂₅涂层表现出出色的粘合强度（Lc> 100 N）和优异的摩擦学性能。因此选择了NbTiN ₂₅涂层，以使用各种乙炔添加物进行进一步的实验。发现NbTiN ₂₅ -CH ₂₅涂层具有足够的碳含量（34.9 at。％），以产生从金属氮化物晶体（NbTiN ₂₅）结构到具有高sp ^2的类金刚石碳结构的过渡。浓度。该涂层具有高的0.063的硬度/弹性模量比和Lc> 100 N的粘合强度。因此，在圆盘滑动条件下的接触界面处形成了富碳的固体润滑剂层，从而获得了优异的润滑性能。摩擦学性能。因此，选择NbTiN ₂₅ -CH ₂₅涂层沉积在微钻上。与未涂层的钻头相比，涂层将微钻的寿命提高了大约三倍。即使在钻了6000个孔之后，这些孔仍显示出优异的质量，钉头比低，表面粗糙度低，直径误差小于1.5％。