Operando detection of various physical quantities in electronic devices under operation has been demonstrated by optically detected magnetic resonance (ODMR) using nitrogen vacancy (NV) centers in diamond. However, the ODMR spectrum may also be affected by the existence of the metal electrodes and wirings of the electronic device, which limits the accurate measurement of the objective physical quantity. In this paper, we report the effect of metal electrodes on the ODMR spectrum of NV centers. It was found that the ODMR contrast increased in the vicinity of the metal electrode fabricated on diamond with NV centers. The microwave concentration at the edge of the metal electrode is a plausible cause for the increase in the ODMR contrast. Our results suggest that it is necessary to recognize that the ODMR spectrum may change near the metal electrode and wirings in the ODMR-based operand analysis of electronic devices.

通过使用钻石中的氮空位（NV）中心进行光学检测的磁共振（ODMR），已经证明了操作中的电子设备中各种物理量的操作检测。然而，ODMR光谱也可能受到电子设备的金属电极和布线的存在的影响，这限制了目标物理量的精确测量。在本文中，我们报告了金属电极对NV中心ODMR光谱的影响。发现在具有NV中心的金刚石上制造的金属电极附近，ODMR对比度增加。金属电极边缘的微波浓度是ODMR对比度增加的可能原因。