This paper proposes a new design of bimorph-type electrothermal actuators based on flexible Ni-Co substrates and describes the results of the finite element method (FEM) simulation and performance evaluation of the actuators. In the design of the actuators, a multilayer structure consisting of an adhesion layer, two insulation layers, and a Pt (platinum) heater layer was formed on the Ni-Co flexible substrate that was patterned in an individual shape. The thin-film actuators proposed in this study could be detached from a Si carrier wafer and adhered to other micro or macrostructural elements. To investigate the temperature distribution and mechanical behavior of the actuators, multiphysics FEM simulations combining electrothermal and static structural analyses were carried out. The actuators were fabricated using conventional microfabrication and electroplating technologies on Si carrier wafer; then, the actuators were peeled off from the carrier wafer using the release process proposed in this paper. After fabricating the actuators, the deflection of their tips was evaluated and compared with that obtained from the FEM simulations.

中文翻译：

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基于柔性Ni-Co衬底的薄膜致动器的设计与性能评估

本文提出了一种基于柔性Ni-Co衬底的双压电晶片型电热执行器的新设计，并描述了执行器的有限元方法（FEM）仿真结果和性能评估。在致动器的设计中，由粘附层，两个绝缘层和Pt（铂）加热器层组成的多层结构形成在Ni-Co柔性基板上，该基板被构图成单独的形状。这项研究中提出的薄膜致动器可以从Si载体晶圆上拆下并粘附到其他微观或宏观结构元素上。为了研究执行器的温度分布和机械性能，结合电热和静态结构分析进行了多物理场有限元模拟。执行器是使用传统的微细加工和电镀技术在硅载体晶片上制造的；然后，使用本文提出的释放工艺将执行器从载体晶圆上剥离下来。在制造了执行器之后，评估了其尖端的挠度，并将其与从FEM仿真获得的挠度进行了比较。