Highly sensitive and system integrable gas sensors play a significant role in industry and daily life, and MoS₂ has emerged as one of the most promising two-dimensional nanomaterials for gas sensor technology. In this study, we demonstrate a scalable and monolithically integrated active-matrix gas sensor array based on large-area bilayer MoS₂ films synthesized via two-successive steps: radio-frequency magnetron sputtering and thermal sulfurization. The fabricated thin-film transistors exhibit consistent electrical performance over a few centimeters area and resulting gas sensors detect NO₂ with ultra-high sensitivity across a wide detection range, from 1 to 256 ppm. This is due to the abundant grain boundaries of the sputtered MoS₂ channel, which perform as active sites for absorption of NO₂ gas molecules. The demonstrated active-matrix gas sensor arrays display good switching capabilities and are anticipated to be readily integrated with additional circuitry for different gas sensing and monitoring applications.

高灵敏度和系统可集成的气体传感器在工业和日常生活中发挥着重要作用，而MoS ₂已经成为气体传感器技术中最有希望的二维纳米材料之一。在这项研究中，我们演示了基于可扩展且单片集成的有源矩阵气体传感器阵列，该阵列基于通过以下两个成功步骤合成的大面积双层MoS ₂薄膜：射频磁控溅射和热硫化。所制造的薄膜晶体管在几厘米的面积上表现出一致的电性能，所得的气体传感器可 在1至256 ppm的宽检测范围内以超高灵敏度检测NO ₂。这是由于溅射的MoS _2的晶界丰富通道，作为吸收NO ₂气体分子的活性位点。演示的有源矩阵气体传感器阵列显示出良好的开关能力，并有望与其他电路轻松集成，以用于不同的气体传感和监测应用。