Abstract Metal-insulator-metal (MIM) capacitor with high-k insulator such as BST enhances specific capacitance. The effects of barium mole fraction (x) of BaxSr1 – xTiO3 ceramic-based MIM capacitor on specific capacitance and leakage current density are reported in this article. BaxSr1 – xTiO3 nanopowder for various x are synthesized using solid-state reaction method and the performance parameters of Ag/BaxSr1 – xTiO3/Ag MIM capacitors are evaluated. The mean crystallite sizes are in 20 to 60 nm range. Ba0.7Sr0.3 TiO3 ceramics show higher relative permittivity owing to its higher mean crystallite size. The insulator with higher crystallite size at dominant orientation shows enhanced leakage performance. Ba0.1 Sr0.9 TiO3 ceramic capacitor shows optimum performance altogether.

中文翻译：

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用于储能应用的 BaxSr1 – xTiO3 陶瓷基 MIM 电容器的合成和性能评估

摘要 具有高 k 绝缘体（如 BST）的金属-绝缘体-金属 (MIM) 电容器可提高比电容。本文报道了 BaxSr1 – xTiO3 陶瓷基 MIM 电容器的钡摩尔分数 (x) 对比电容和漏电流密度的影响。使用固态反应方法合成了各种 x 的 BaxSr1 – xTiO3 纳米粉末，并评估了 Ag/BaxSr1 – xTiO3/Ag MIM 电容器的性能参数。平均微晶尺寸在 20 至 60 nm 范围内。Ba0.7Sr0.3 TiO3 陶瓷由于其较高的平均微晶尺寸而显示出较高的相对介电常数。在主导方向具有较高微晶尺寸的绝缘体显示出增强的泄漏性能。Ba0.1 Sr0.9 TiO3 陶瓷电容器整体表现出最佳性能。