Surface-enhanced Raman scattering (SERS) with unique molecular vibrational fingerprints for identifying analytes provides an effective spectroscopic approach for the detection of trace molecules in biomedical/analytical fields. Although a great amount of efforts has been devoted to developing various SERS substrates with hierarchical micro/nanostructures, challenges remain in completely concentrating the target molecules within a sensitive area and thereby enhancing detection sensitivity. Here, we report trace molecular detection using superhydrophobic microcrater array as surface-enhanced Raman substrate (SMA-SERS). The hierarchically ordered microcrater array with plasmonic nanoparticle clusters is quickly obtained by the two-step process of femtosecond laser texturing and magnetron sputtering. The resultant substrates with hierarchical micro-/nanostructures show excellent superhydrophobicity with a contact angle above 150° and satisfactory plasmonic nanostructures with the easily attainable Raman signal enhancement factor of ~4.82 × 10⁸. The signals on the SMA-SERS maintain uniformity with a relative standard deviation of <15%. These findings manifest that the SMA-SERS is an extraordinary strong candidate for obtaining high-quality and reliable SERS, facilitating a widespread use of SERS for practical applications.

具有独特的分子振动指纹图谱的表面增强拉曼散射（SERS）用于鉴定分析物，为检测生物医学/分析领域中的痕量分子提供了一种有效的光谱方法。尽管已投入大量努力来开发具有分级微/纳米结构的各种SERS底物，但是在将目标分子完全浓缩在敏感区域内从而提高检测灵敏度方面仍然存在挑战。在这里，我们报告使用超疏水微弹孔阵列作为表面增强拉曼底物（SMA-SERS）进行痕量分子检测。通过飞秒激光织构化和磁控溅射两步过程，可以快速获得具有等离激元纳米粒子簇的分层有序微坑阵列。⁸。SMA-SERS上的信号保持均匀性，相对标准偏差小于15％。这些发现表明，SMA-SERS是获得高质量和可靠SERS的非凡的强大候选者，从而促进了SERS在实际应用中的广泛使用。