Abstract The surface sintering approach was examined in the present manuscript to obtain single cathode material consisting of multiple elements. Design of electromagnetic discharge without the use of a mechanical press was utilized for this purpose at pulsed pressure oscillations, ranging from 25 to 125 Pa. Meanwhile, each pulsed plasma flux provided absolute energy varying from 87.8 to 279.5 J, resulting in a well-sintered tungsten boride crust within carbon matrix (WBx-C). Its application in sense of sintering degree was estimated by measuring thermal diffusivity, with a maximum value of 3.65 mm2/s achieved at the mid-range neon injection (75–100 Pa). Further, as-surface-sintered cathode material provided suitable contribution to the promising deposition rate (54 nm/min) of W-B-C films by employing gas injection magnetron sputtering in the single magnetron cycle. The quantitative analysis examined using photoelectron X-ray spectroscopy showed that W-B-C films are composed of four elements, of which the W/B ratio was differed prior to prepared cathode materials stoichiometry. The chemical bonding state study revealed the C-W, B-W, B-C and B-O bonds, of which W2BC nanocrystallites (∼ 2 nm) were formed in the amorphous structure under the arrangement of neon pulsed glow discharge, and as indicated results of fast Fourier transform and Raman spectra. Nucleation of those ternary nanoclusters promoted a Vickers microhardness result of 26.3 GPa, emphasizing a sensitive response to the mechanical performance of deposited W-B-C films.

中文翻译：

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使用磁控溅射从表面烧结单粉末阴极合成 WBC 薄膜中的脉冲氖注入设计

摘要 在本手稿中研究了表面烧结方法以获得由多种元素组成的单一阴极材料。不使用机械压力机的电磁放电设计用于此目的，脉冲压力振荡范围为 25 到 125 Pa。同时，每个脉冲等离子体通量提供的绝对能量从 87.8 到 279.5 J，导致烧结良好碳基体中的硼化钨结壳 (WBx-C)。通过测量热扩散率估计其在烧结程度方面的应用，在中程氖注入（75-100 Pa）时达到最大值 3.65 mm2/s。更多，通过在单个磁控管循环中采用气体注入磁控管溅射，表面烧结阴极材料为 WBC 薄膜的有希望的沉积速率 (54 nm/min) 提供了适当的贡献。使用光电子 X 射线光谱检查的定量分析表明，WBC 膜由四种元素组成，其中 W/B 比在制备阴极材料化学计量之前是不同的。化学键合状态研究揭示了 CW、BW、BC 和 BO 键，其中在氖脉冲辉光放电排列下的无定形结构中形成了 W2BC 纳米微晶（~2 nm），以及快速傅立叶变换和拉曼光谱的结果光谱。这些三元纳米团簇的成核促进了 26.3 GPa 的维氏显微硬度结果，