Laser induced breakdown spectroscopy (LIBS) has been applied for the depth profiling of multilayer metallic coating structure which is simulated to the ITER-like wall materials in fusion devices such as EAST tokamak. The coatings were produced by magnetron sputtering and characterized by LIBS using a Nd:YAG laser at 1064 nm with pulse duration of 5 ns. The light from the resulting plasma was analyzed as a function of both number of laser pulse (N) and elemental spectral line intensity. The depth profile of the multilayer coating was determined by three different spectral signal processing methods; intensity background subtraction, intensity normalization and linear Pearson correlation. The intensity normalization method provides the best outcomes/solutions for thickness measurement and analysis of interfaces of multilayer coatings among other methods. The evolution of spectral intensity representing different materials was properly examined for 90 consecutive laser shots at the same spot. The ablation behaviour of the coating materials was analyzed in terms of ablation rate under the laser pulse of various fluences. In a much deep crater, some factors originating from laser ablation, such as material re-deposition and plasma shielding effect were analyzed. As a comparison, the depth, shape and diameter of craters were also measured using SEM and a profilometer. The influence of laser power density on the ablation rate and crater profile was investigated. The elemental composition, inside the crater, was verified by the EDX technique. The results indicate that LIBS has a potential power for in-situ depth profiling of multilayer coatings on the wall of the EAST.

激光诱导击穿光谱法（LIBS）已用于多层金属涂层结构的深度剖析，该结构在EAS​​T托卡马克等聚变装置中模拟了ITER类壁材料。涂层是通过磁控溅射制备的，并使用Nd：YAG激光在1064 nm处以5 ns的脉冲持续时间进行LIBS表征。来自产生的等离子体的光被分析为激光脉冲数（N）和元素光谱线强度。多层涂层的深度分布是通过三种不同的光谱信号处理方法确定的。强度背景扣除，强度归一化和线性皮尔逊相关性。强度归一化方法为厚度测量和多层涂层界面的分析提供了最佳方法/解决方案。代表不同材料的光谱强度演变已在同一点连续90次激光照射中得到了适当检查。根据在各种能量密度的激光脉冲下的烧蚀率，分析了涂层材料的烧蚀行为。在一个更深的陨石坑中，分析了一些由激光烧蚀引起的因素，例如材料重新沉积和等离子体屏蔽效果。作为比较，深度 凹坑的形状和直径也使用SEM和轮廓仪测量。研究了激光功率密度对烧蚀速率和弹坑轮廓的影响。火山口内部的元素组成已通过EDX技术进行了验证。结果表明LIBS具有潜在的潜力EAST壁上多层涂层的原位深度剖析。