Abstract In this work, we report a novel, mini microplasma-assisted gas-phase synthesis reactor which enables the localized deposition of high quality carbon nanotubes (CNTs). Analogous to conventional gas-phase growth, which utilizes the furnace heating to induce dissociation of the reactant species, formation of the catalyst nanoparticles, and nucleation of the CNTs, our process replaces the furnace with the microplasma as the sole reaction source. In doing so, this reactor takes full advantage of the merits of the microplasma apparatus, specifically atmospheric pressure operation, efficient dissociation of molecular species, and small size to synthesize highly crystalline small diameter single and double-walled CNTs at an estimated growth rate of 1000−6400 μm/s. In addition, being in gas phase and channeled through a 0.8 mm inner diameter ceramic reactor, the grown CNTs could be localized onto a substrate located downstream in the reactor.

中文翻译：

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一种用于生长高结晶碳纳米管的基于微型微等离子体的合成反应器

摘要 在这项工作中，我们报告了一种新型的微型微等离子体辅助气相合成反应器，它能够局部沉积高质量的碳纳米管 (CNT)。类似于传统的气相生长，它利用炉子加热来诱导反应物物种的解离、催化剂纳米颗粒的形成和 CNT 的成核，我们的工艺用微等离子体代替炉子作为唯一的反应源。在此过程中，该反应器充分利用了微等离子体装置的优点，特别是常压操作、分子物种的有效解离和小尺寸，以估计 1000 的增长率合成高度结晶的小直径单壁和双壁碳纳米管。 -6400μm/s。此外，处于气相并通过 0.