Nano/microfabrication experiments on the surface of silicon solar cell are performed by ultraviolet femtosecond laser in the fluence range from 0.10 to 0.70 J/cm². The surface morphology change of sample was observed by a laser scanning microscopy and a scanning electron microscope. The crystallinity of surface irradiated by laser pulses was evaluated by Raman spectroscopy. The ablation threshold for silicon was estimated to be 0.10 J/cm². We successfully produced nano‐structures on the surface of silicon solar cell maintaining single‐crystalline with the irradiation at the laser fluence of 0.10 J/cm².

中文翻译：

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紫外飞秒激光脉冲辐照的硅太阳能电池的表面粗糙度和结晶度

通过紫外飞秒激光在0.10至0.70 J / cm ²的注量范围内对硅太阳能电池的表面进行纳米/微细加工实验。通过激光扫描显微镜和扫描电子显微镜观察样品的表面形态变化。通过拉曼光谱法评价由激光脉冲照射的表面的结晶度。硅的消融阈值估计为0.10 J / cm ²。我们成功地在硅太阳能电池的表面上产生了纳米结构，并以0.10 J / cm ²的激光通量辐照，保持了单晶。