Chemical filters are the most important devices for removing gas‐phase pollutants in clean rooms. However, the testing concentration of chemical filters is too high for reflecting their performance in a real clean room environment. This study tested the adsorption performance of chemical filters in the two most commonly used shapes at different concentrations. Then, the Langmuir equation and Wheeler‐Jonas kinetic equation were combined to establish an adsorption performance prediction model of chemical filters under actual conditions. The predicted values of the model were in good agreement with the experimental results, which indicated the high accuracy of the prediction model. The model does not need to test the microscopic parameters of the adsorbent and can maintain high accuracy at low concentrations. A fast method for calculating the service life of chemical filters was also presented. Based on this model, the total cost of using a chemical filter with a high carbon content in microelectronic clean rooms could be decreased by 45% due to decreasing the number of filter replacements over 3 months. So a chemical filter with a high carbon content should be preferred over a filter with low resistance in microelectronic clean rooms.

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基于预测模型的洁净室化学过滤器长期性能分析

化学过滤器是去除洁净室中气相污染物的最重要设备。然而，化学过滤器的测试浓度太高，无法反映其在真实洁净室环境中的性能。本研究测试了两种最常用形状的化学过滤器在不同浓度下的吸附性能。然后，结合Langmuir方程和Wheeler-Jonas动力学方程，建立了化学过滤器在实际条件下的吸附性能预测模型。模型的预测值与实验结果吻合较好，表明该模型的预测精度较高。该模型不需要测试吸附剂的微观参数，可以在低浓度下保持高精度。还提出了一种计算化学过滤器使用寿命的快速方法。基于此模型，由于在 3 个月内减少了过滤器更换次数，因此在微电子洁净室中使用高碳化学过滤器的总成本可以降低 45%。因此，在微电子洁净室中，碳含量高的化学过滤器应优于阻力低的过滤器。