当前位置：
X-MOL 学术
›
Int. J. Energy Res.
›
论文详情
Our official English website, www.x-mol.net, welcomes your
feedback! (Note: you will need to create a separate account there.)
Improved Al2O3/SiNx and SiO2/SiNx stack passivation layer structure PERC sc‐silicon solar cells on mass production line
International Journal of Energy Research ( IF 4.3 ) Pub Date : 2020-11-09 , DOI: 10.1002/er.6201 Hao Liu 1 , Ya Wang 2 , Liming Dong 3 , Haiou Wang 4 , Zhengzhong Zhang 1
International Journal of Energy Research ( IF 4.3 ) Pub Date : 2020-11-09 , DOI: 10.1002/er.6201 Hao Liu 1 , Ya Wang 2 , Liming Dong 3 , Haiou Wang 4 , Zhengzhong Zhang 1
Affiliation
|
In this study, we have successfully developed an industrially feasible stack rear Al2O3/SiNx and front SiO2/SiNx passivation layer PERC solar cells fabrication method based on the existing PERC sc‐silicon solar cells production line. The manufacturing parameters of the deposition processes were adapted to get the best passivation effect. The front SiO2/SiNx passivation layer deposition parameters were researched for the best front passivation effect. The fabrication parameters of the first high refractive index SiNx layer were improved. And a new thin low refractive index SiNx capping layer at SiO2/SiNx interface was introduced. Meanwhile, the stack rear Al2O3/SiNx layer structure with double SiNx layers was also researched, which exhibited good passivation results for the rich hydrogen content in high refractive index SiNx layer. The industrial stack passivation layers PERCs with new thin low refractive index SiNx capping layer possess good performances with an efficiency of 22.15%.
中文翻译：
量产线上改进的Al2O3 / SiNx和SiO2 / SiNx叠层钝化层结构PERC sc-硅太阳能电池
在这项研究中，我们已经成功开发了一种工业可行的堆叠式后Al 2 O 3 / SiN x和前SiO 2 / SiN x钝化层PERC太阳能电池制造方法，基于现有的PERC sc-硅太阳能电池生产线。调整沉积工艺的制造参数以获得最佳的钝化效果。为了获得最佳的前钝化效果，研究了前SiO 2 / SiN x钝化层的沉积参数。改善了第一高折射率SiN x层的制造参数。并在SiO上形成一个新的薄的低折射率SiN x覆盖层引入了2 / SiN x接口。同时，还研究了具有双层SiN x层的堆叠后Al 2 O 3 / SiN x层结构，对高折射率SiN x层中富氢含量显示出良好的钝化效果。具有新型薄的低折射率SiN x覆盖层的工业堆叠钝化层PERC具有良好的性能，效率为22.15％。
更新日期：2020-11-09
中文翻译：
量产线上改进的Al2O3 / SiNx和SiO2 / SiNx叠层钝化层结构PERC sc-硅太阳能电池
在这项研究中，我们已经成功开发了一种工业可行的堆叠式后Al 2 O 3 / SiN x和前SiO 2 / SiN x钝化层PERC太阳能电池制造方法，基于现有的PERC sc-硅太阳能电池生产线。调整沉积工艺的制造参数以获得最佳的钝化效果。为了获得最佳的前钝化效果，研究了前SiO 2 / SiN x钝化层的沉积参数。改善了第一高折射率SiN x层的制造参数。并在SiO上形成一个新的薄的低折射率SiN x覆盖层引入了2 / SiN x接口。同时，还研究了具有双层SiN x层的堆叠后Al 2 O 3 / SiN x层结构，对高折射率SiN x层中富氢含量显示出良好的钝化效果。具有新型薄的低折射率SiN x覆盖层的工业堆叠钝化层PERC具有良好的性能，效率为22.15％。
京公网安备 11010802027423号