Electron tomography has been widely applied to three-dimensional (3D) morphology characterization and chemical analysis at the nanoscale. A HAADF-EDS bimodal tomographic (HEBT) reconstruction technique has been developed to extract high resolution element-specific information. However, the reconstructed elemental maps cannot be directly converted to quantitative compositional information. In this work, we propose a quantification approach for obtaining elemental weight fraction maps from the HEBT reconstruction technique using the physical parameters extracted from a Monte Carlo code, MC X-ray. A similar quantification approach is proposed for the EDS-STEM tomographic reconstruction. The performance of the two quantitative reconstruction methods, using the simultaneous iterative reconstruction technique, are evaluated and compared for a simulated dataset of a two-dimensional phantom sample. The effects of the reconstruction parameters including the number of iterations and the weight of the HAADF signal are discussed. Finally, the two approaches are applied to an experimental dataset to show the 3D structure and quantitative elemental maps of a particle of flux melted metal-organic framework glass.

中文翻译：

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使用 EDS-STEM 断层扫描和 HAADF-EDS 双峰断层扫描提取 3D 定量图

电子断层扫描已广泛应用于纳米级的三维 (3D) 形态表征和化学分析。已经开发了 HAADF-EDS 双峰断层扫描 (HEBT) 重建技术来提取高分辨率元素特定信息。然而，重建的元素图不能直接转换为定量的成分信息。在这项工作中，我们提出了一种量化方法，用于使用从蒙特卡洛代码（MC X 射线）中提取的物理参数从 HEBT 重建技术获得元素重量分数图。为 EDS-STEM 断层扫描重建提出了类似的量化方法。两种定量重建方法的性能，使用同步迭代重建技术，对二维体模样本的模拟数据集进行评估和比较。讨论了包括迭代次数和HAADF信号权重在内的重构参数的影响。最后，将这两种方法应用于实验数据集，以显示助熔剂熔化的金属有机框架玻璃颗粒的 3D 结构和定量元素图。