A novel resistive chemical-mechanical sensor for hydrogen gas detection was designed and manufactured by using MEMS processing technology. The sensor combines a composite piezoresistor of silver nanowires-polyimide and a palladium sputtered microcantilever, and the optimized structure of which has been obtained through theoretical and simulation analysis. With a series of experimental testing, the fabricated sensor achieved the ultra-high sensitivity of 2825, 8071, 28250 and 47083 for hydrogen detection at the concentration of 0.4%, 0.8%, 1.2%, 1.6% and 2.0%, respectively. The ultra-high sensitive detection for hydrogen was enabled from the synergistic function of both the surface resistance effect between the palladium coated cantilever and silver nanowires-polyimide piezoresistor, and the bulk resistance effect of the silver nanowires-polyimide piezoresistor. In addition, the sensor also demonstrates excellent stability, which has high potential for practical hydrogen gas detection.

利用MEMS加工技术设计制造了一种新颖的用于氢气检测的电阻式化学机械传感器。该传感器结合了银纳米线-聚酰亚胺和钯溅射微悬臂的复合压敏电阻，并通过理论和仿真分析获得了其最佳结构。通过一系列的实验测试，所制造的传感器分别在0.4％，0.8％，1.2％，1.6％和2.0％的浓度下实现了氢检测的2825、8071、28250和47083的超高灵敏度。钯涂层悬臂与银纳米线-聚酰亚胺压敏电阻之间的表面电阻效应的协同作用实现了氢的超高灵敏检测，和银纳米线-聚酰亚胺压敏电阻的体电阻效应。此外，该传感器还具有出色的稳定性，对于实际的氢气检测具有很高的潜力。