Aiming at the problem of low efficiency in cutting silicon crystals with traditional wire electrical discharge machining (wire EDM) equipment, this paper proposes a method to improve the efficiency of electrical discharge cutting for silicon crystals by using composite pulse power to process semiconductors. This paper established a wire EDM equivalent circuit model, analyzed the magnitude of the discharge sustaining voltage on metal and semiconductor in wire EDM, studied the current-voltage characteristics of silicon crystals under a composite power supply, and compared the machining performance with and without the new power supply. The experiments show that, compared with the single power supply, the composite power supply can increase the machining current, and the existence of its high-voltage module can increase the probability of forming the discharge channel, which is convenient for wire EDM; using this power supply, the traditional servo system based on voltage detection can be used to distinguish the three typical machining states (short circuit, normal discharge, and no-load) in wire EDM for semiconductor machining, realize an effective servo feed, and improve machining stability; compared with the single power supply with an open voltage of 80 V, the new power supply with an open voltage of 80 V for the low-voltage module and 120 V for the high-voltage module has a certain increase in surface roughness, the processing efficiency is increased by 75%, and the kerf width is increased by 3.4%.

针对传统电火花线切割加工设备切割硅晶体效率低的问题，提出了一种利用复合脉冲功率处理半导体工艺来提高硅晶体电火花切割效率的方法。本文建立了线电火花加工的等效电路模型，分析了线电火花加工中金属和半导体上放电维持电压的大小，研究了复合电源下硅晶体的电流-电压特性，并比较了有无电源时的加工性能。新电源。实验表明，与单电源相比，复合电源可以增加加工电流，其高压模块的存在可以增加形成放电通道的可能性，方便电火花线切割；使用该电源，可以使用基于电压检测的传统伺服系统来区分用于半导体加工的线电火花加工中的三种典型加工状态（短路，正常放电和空载），实现有效的伺服进给并改进加工稳定性 与具有80 V开路电压的单电源相比，用于低压模块的开路电压为80 V而高压模块的开路电压为120 V的新电源在表面粗糙度上有一定的提高，效率提高了75％，锯齿宽度增加了3.4％。传统的基于电压检测的伺服系统可以用来区分电火花线切割机在半导体加工中的三种典型加工状态（短路，正常放电和空载），实现有效的伺服进给并提高加工稳定性。与具有80 V开路电压的单电源相比，用于低压模块的开路电压为80 V而高压模块的开路电压为120 V的新电源在表面粗糙度上有一定的提高，效率提高了75％，锯齿宽度增加了3.4％。传统的基于电压检测的伺服系统可以用来区分电火花线切割机在半导体加工中的三种典型加工状态（短路，正常放电和空载），实现有效的伺服进给并提高加工稳定性。与具有80 V开路电压的单电源相比，用于低压模块的开路电压为80 V而高压模块的开路电压为120 V的新电源在表面粗糙度上有一定的提高，效率提高了75％，锯齿宽度增加了3.4％。