In this Letter, step-controllable radio frequency (RF) micro-electro-mechanical systems (MEMS) tunable capacitor with ultra-wide tuning range using netted membrane structure has newly proposed, fabricated, and characterised for highly miniaturised and reconfigurable RF devices and systems applications. The proposed tunable capacitor could step-wise increase the capacitance by introducing a few slits on the movable top membrane with a netted structure. The fabricated tunable capacitor exhibited 2.38–20.04 pF of tuning range and 146 (off-state) and 28 (full contacted-state) of quality factors at 1 GHz, respectively.

中文翻译：

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使用网状金属膜具有超宽调谐范围的步进可控射频 MEMS 可调电容器

在这封信中，使用网状膜结构具有超宽调谐范围的步进可控射频 (RF) 微机电系统 (MEMS) 可调谐电容器已新提出、制造并表征为高度小型化和可重构的 RF 设备和系统应用程序。所提出的可调电容器可以通过在具有网状结构的可移动顶膜上引入一些狭缝来逐步增加电容。制造的可调电容器在 1 GHz 下分别表现出 2.38-20.04 pF 的调谐范围和 146（关态）和 28（全接触状态）的品质因数。