This paper investigates algorithms for controlling the automated material handling system (AMHS) in a wafer fab. In particular, we examine algorithms that route vehicles for both the pick up and delivery of lots, with the goal of improving vehicle flow, cycle time, and avoiding congested edges in the AMHS. We simulate the proposed methods using a stylized simulation model and demonstrate that algorithms designed specifically to anticipate congestion can significantly improve some fab metrics.

中文翻译：

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改善晶圆厂AMHS系统中OHTC控制器的调度和控制

本文研究了用于控制晶圆厂自动材料处理系统（AMHS）的算法。特别是，我们研究了针对车辆的接送和运送路线的算法，目的是改善车辆流量，缩短周期时间并避免AMHS中的拥挤边缘。我们使用程式化的仿真模型对提出的方法进行仿真，并证明专门为预期拥堵而设计的算法可以显着改善某些晶圆厂指标。