Abstract Barium Strontium Titanate (BST) is a material that has a dielectric constant and high load storage capacity. BST is made with 3 variations namely BST without container, BST in Niobium Oxide container, and BST in chlorophyll container. Percentage of container mass is 5% and 10% of BST mass. The method used is Chemical Solution Deposition (CSD). The process of growing thin films is done using Spin Coating with a speed of 3000 rpm for 30 seconds. The dropping process is carried out 3 times. The BST was turned at 850 °C for 22 hours of detention. The XRD characterization results showed that there was no structural shift from the BST that was made, this was seen from the lattice parameter values obtained, namely 4.07Ǻ for BST, 4.07Ǻ for BST at 5% niobium oxide, 4.07Ǻ for BST at 10% niobium oxide, 4.06 Ǻ BST was taken by 5% chlorophyll, and 4.08 ST BST was taken by 10% chlorophyll. Characterization of optical properties showed that the addition of niobium oxide and chlorophyll reservoirs caused the absorbance of BST to decrease, the refractive index value to increase, and the gap energy value to decrease. Gap energy value is 2.23 eV at BST at 5% niobium oxide, 2.05 eV at BST at 10% niobium oxide, 2.46 eV at BST at 5% chlorophyll, and 2.47 eV at BST at 10% chlorophyll, where the energy gap value is based on literature 3.45 eV.

中文翻译：

---

在 p 型硅衬底 (111) 掺杂氧化铌和叶绿素上生长的 Ba0.5Sr0.5TiO3 材料的光学表征

摘要 钛酸锶钡（BST）是一种具有介电常数和高负载存储能力的材料。BST 有 3 种变体，即无容器的 BST、氧化铌容器中的 BST 和叶绿素容器中的 BST。容器质量的百分比为 BST 质量的 5% 和 10%。使用的方法是化学溶液沉积 (CSD)。薄膜的生长过程是使用旋涂以 3000 rpm 的速度进行 30 秒。下落过程进行3次。BST 在 850 °C 下转动 22 小时。XRD 表征结果表明 BST 没有结构偏移，这可以从获得的晶格参数值看出，即 BST 为 4.07Ǻ，5% 氧化铌时 BST 为 4.07Ǻ，10 时 BST 为 4.07Ǻ % 氧化铌，4.06 Ǻ BST 被 5% 叶绿素吸收，4. 08 ST BST 取10%叶绿素。光学特性表征表明，氧化铌和叶绿素储库的加入导致 BST 的吸光度降低，折射率值增加，间隙能量值降低。能隙能量值为 2.23 eV，BST 含 5% 氧化铌，2.05 eV，BST 含 10% 氧化铌，2.46 eV，BST 含 5% 叶绿素，2.47 eV，BST 含 10% 叶绿素，其中能隙值基于文献 3.45 eV。