Electron backscatter diffraction (EBSD) in the scanning electron microscope is routinely used for microstructural characterisation of polycrystalline materials. Maps of EBSD data are typically acquired at high stage tilt and slow scan speed, leading to tilt and drift distortions that obscure or distort features in the final microstructure map. In this paper, we describe TrueEBSD, an automatic postprocessing procedure for distortion correction with pixel-scale precision. Intermediate images are used to separate tilt and drift distortion components and fit each to a physically-informed distortion model. We demonstrate TrueEBSD on three case studies (titanium, zirconium and hydride containing Zr), where distortion removal has enabled characterisation of otherwise inaccessible microstructural features.

中文翻译：

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TrueEBSD：校正电子背散射衍射图中的空间失真

扫描电子显微镜中的电子背散射衍射 (EBSD) 通常用于多晶材料的微观结构表征。EBSD 数据图通常在高平台倾斜和低扫描速度下获取，导致倾斜和漂移失真，从而模糊或扭曲最终微观结构图中的特征。在本文中，我们描述了 TrueEBSD，这是一种具有像素级精度的失真校正自动后处理程序。中间图像用于分离倾斜和漂移失真分量，并将每个分量拟合到物理通知的失真模型中。我们在三个案例研究（含 Zr 的钛、锆和氢化物）中展示了 TrueEBSD，其中畸变消除使得能够表征否则无法访问的微观结构特征。