A new high-precision two-dimensional (2D) micro-accelerometer is proposed in this study to measure low-frequency vibration. A flexure hinge with low crosstalk and high axial stiffness is used as a spring, and a 2D optical angular displacement sensor is used to detect the motion of the inertial mass. The accelerometer is calibrated using a homemade one-dimensional horizontal micro-vibration calibration system. Furthermore, the accelerometer is dynamically identified through the adaptive least-square method. The resonance frequencies of the accelerometer in X- and Y-axes are identified as 43.16 and 40.31 Hz, respectively. The working frequency ranges of the accelerometer, which are approximately 20% of their resonant frequency, are obtained according to the calibration experimental results. The sensitivities of the accelerometer in the X- and Y-axes are 25.17 and 25.55 V/g, respectively. The resolutions of the accelerometer in the X- and Y-axes are 0.07 and 0.06 mg, respectively. These findings are consistent with the theoretical analysis results. The effectiveness of the accelerometer is verified by measuring low-frequency and low-amplitude dynamic responses.

在这项研究中提出了一种新的高精度二维（2D）微加速度计来测量低频振动。具有低串扰和高轴向刚度的挠性铰链用作弹簧，而2D光学角位移传感器用于检测惯性质量的运动。加速度计使用自制的一维水平微振动校准系统进行校准。此外，加速度计是通过自适应最小二乘法动态识别的。加速度计在X轴和Y轴上的共振频率分别标识为43.16和40.31 Hz。根据校准实验结果获得加速度计的工作频率范围，大约是其谐振频率的20％。X和Y轴上的加速度计的灵敏度分别为25.17 V / g和25.55 V / g。X和Y轴上的加速度计分辨率分别为0.07和0.06 mg。这些发现与理论分析结果一致。通过测量低频和低幅动态响应可以验证加速度计的有效性。