Abstract The demand for large range three-degrees-of-freedom (3-DOF) micro/nanopositioning mechanisms has been increased recently for potential utilization in many applications. However, these mechanisms suffer from a large footprint and low motion accuracy, which severely affect their exploitation. In this paper, a compact mechanism is proposed to achieve a large workspace and a high motion accuracy. Leaf springs are adopted to realize a fully compliant mechanism and three Voice Coil Motors (VCMs) are used in actuation. The VCMs are enclosed within driving arms and the leaf springs are distributed in a multilevel design to improve the mechanism compactness. The analytical model is developed and a prototype is fabricated to examine statics, dynamics, and feedback performance. Moreover, a laser-based sensing approach is developed to capture the 3-DOF motion. Furthermore, a robust control technique is designed to improve tracking performance. Results show that this mechanism possesses a compact design with a large workspace. Also, high resolution and tracking performance are achieved.

中文翻译：

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大范围 3-DOF 微定位平台的设计、建模和控制

摘要 最近对大范围三自由度 (3-DOF) 微/纳米定位机制的需求有所增加，以用于许多应用的潜在利用。然而，这些机制存在占地面积大和运动精度低的问题，这严重影响了它们的利用。在本文中，提出了一种紧凑的机构来实现大工作空间和高运动精度。采用板簧来实现完全柔顺的机构，并使用三个音圈电机 (VCM) 进行驱动。VCM封闭在驱动臂内，板簧采用多级分布设计，以提高机构的紧凑性。开发分析模型并制造原型以检查静力学、动力学和反馈性能。而且，开发了一种基于激光的传感方法来捕获 3-DOF 运动。此外，还设计了一种稳健的控制技术来提高跟踪性能。结果表明，该机构设计紧凑，工作空间大。此外，还实现了高分辨率和跟踪性能。