Microresonators with high Q -factor are essential components for optomechanical experiments. Here we report on the development of ‘cat-flap’ micro-pendulums consisting of sub-millimetre scale micromirrors supported by nanometre-thickness flexures. The micromirror pendulum is designed to achieve the lowest possible flexure stiffness, which enables maximal dilution of mechanical losses through the use of optical springs. An angular spring constant of ##IMG## [http://ej.iop.org/images/0022-3727/54/3/035104/dabb435ieqn1.gif] {$1 \times {10^{ - 9}}{\text{N}} \cdot {\text{m/radian}}$} , corresponding to a fundamental frequency (in the absence of gravity) of 18 Hz has been demonstrated. It is shown that Q -factors up to ##IMG## [http://ej.iop.org/images/0022-3727/54/3/035104/dabb435ieqn2.gif] {${10^8}$} at an optical spring frequency of 25 kHz could be achieved with these pendulums. By extrapolating the measurement results to a sam...

中文翻译：

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猫瓣微摆锤用于低噪声光机械

具有高Q因子的微谐振器是光机械实验必不可少的组件。在这里，我们报道由纳米厚度挠曲支撑的亚毫米级微镜组成的“猫拍”式微摆的发展。微镜摆的设计可实现最低的挠曲刚度，从而可通过使用光学弹簧最大程度地减小机械损耗。## IMG ##的角弹簧常数[http://ej.iop.org/images/0022-3727/54/3/035104/dabb435ieqn1.gif] {$ 1 \ times {10 ^ {-9}} {已经证明了\ text {N}} \ cdot {\ text {m / radian}} $}，它对应于18 Hz的基本频率（在没有重力的情况下）。结果表明，Q因子高达## IMG ## [http://ej.iop.org/images/0022-3727/54/3/035104/dabb435ieqn2。gif]使用这些摆锤可以在25 kHz的光学弹簧频率下达到{$ {10 ^ 8} $}。通过将测量结果外推到sam ...