A reduction of the interprobe distance in multiprobe and double-tip scanning tunneling microscopy to the nanometer scale has been a longstanding and technically difficult challenge. Recent multiprobe systems have allowed for significant progress by achieving distances of ~30 nm using two individually driven, traditional metal wire tips. For situations where simple alignment and fixed separation can be advantageous, we present the fabrication of on-chip double-tip devices that incorporate two mechanically fixed gold tips with a tip separation of only 35 nm. We utilize the excellent mechanical, insulating and dielectric properties of high-quality SiN as a base material to realize easy-to-implement, lithographically defined and mechanically stable tips. With their large contact pads and adjustable footprint, these novel tips can be easily integrated with most existing commercial combined STM/AFM systems.

将多探针和双尖端扫描隧道显微镜中的探针间距离减小到纳米级一直是一项长期存在且技术上困难的挑战。最近的多探针系统通过使用两个单独驱动的传统金属线尖端实现 ~30 nm 的距离，取得了重大进展。对于简单对齐和固定分离可能具有优势的情况，我们提出了片上双尖端器件的制造，该器件包含两个机械固定的金尖端，尖端间隔仅为 35 nm。我们利用高质量 SiN 作为基础材料的优异机械、绝缘和介电性能来实现易于实施、光刻定义和机械稳定的尖端。凭借其大接触垫和可调节的占地面积，