An energy band gap measurement method based on nano-beam STEM with small off-axis angle valence band transmission electron energy loss spectroscopy (TEELS) is reported. The effect of multiple scattering event is removed by self-convolution method to obtain a single scattering loss function and a dielectric function is calculated from the single scattering valence band energy loss function through Kramers-Kronig (K-K) analysis. Optical band gaps are extracted from energy loss spectra and the imaginary part of the dielectric functions for crystalline and amorphous SiOx, SiNx, and SiON through linear fitting of on-set regions yielding results that are independent of sample thickness. The TEELS band gap data are consistent with those obtained from reflection electron energy loss spectroscopy (REELS) measurements.

中文翻译：

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带小离轴角透射电子能量损失谱 (TEELS) 的纳米束 STEM 带隙测量

报道了一种基于纳米束 STEM 的带小离轴角价带透射电子能量损失谱 (TEELS) 的能带隙测量方法。通过自卷积方法去除多次散射事件的影响以获得单个散射损失函数，并且通过Kramers-Kronig (KK)分析从单次散射价带能量损失函数计算介电函数。通过对起始区域的线性拟合，从能量损失光谱和介电函数的虚部中提取出光学带隙，用于结晶和非晶 SiOx、SiNx 和 SiON，产生与样品厚度无关的结果。TEELS 带隙数据与从反射电子能量损失光谱 (REELS) 测量中获得的数据一致。