Abstract This paper examines the robustness of pressure sensors fabricated with the M&NEMS technology at high temperature for industrial applications. Thermal cycling up to 522 °C showed good reproducibility of results. Comparison of sensor sensitivity before and after thermal cycling was very satisfactory with a variation in the range of 4–5%. The wafer level packaging of the sensor withstands very well these temperatures and it can be improved even further by changing the metallization of the pads in order to achieve even higher temperatures.

中文翻译：

---

具有高达 522 °C 的压阻式纳米压力计的压力传感器的稳健性

摘要 本文研究了采用 M&NEMS 技术制造的用于工业应用的高温压力传感器的稳健性。高达 522 °C 的热循环显示出良好的结果重现性。热循环前后传感器灵敏度的比较非常令人满意，变化范围为 4-5%。传感器的晶圆级封装能够很好地承受这些温度，并且可以通过改变焊盘的金属化来进一步改进以达到更高的温度。