The dynamics of a proposed microelectromechanical system (MEMS) consisting of an array of limit cycle oscillators (LCOs) are analyzed. The LCOs have dissimilar limit cycle frequencies and are coupled in a nearest-neighbor configuration via electrostatic fringing fields. The emergence of synchrony in the array is outlined for two cases: self-synchronization of the array to a single frequency, and entrainment of the array to an external inertial drive. Numerical analysis is used to study the dependence of synchrony on system parameters such as the coupling strength, detuning in the array, inertial drive strength, and frequency of the inertial drive. It is shown that the route to synchrony is complex due to the formation of frequency clusters. The limit cycle frequency of a single equivalent oscillator, with parameters averaged over the array is used as an estimate for the frequency of locking for the array. This equivalent oscillator is used to approximate the entire array and perturbation methods are applied to it. The perturbation method qualitatively captures the entrainment characteristics of the externally-driven array. This analysis is also used to track the complex sequence of bifurcations that occur as the drive strength changes, and to estimate the threshold drive strength for entrainment.

分析了由限制循环振荡器（LCO）阵列组成的拟议微机电系统（MEMS）的动力学。LCO具有不同的极限循环频率，并通过静电边缘场以最近邻配置耦合。在两种情况下，概述了阵列中同步的出现：将阵列自同步到单个频率，以及将阵列夹带到外部惯性驱动器。数值分析用于研究同步性对系统参数的依赖性，例如耦合强度，阵列失谐，惯性驱动强度和惯性驱动频率。结果表明，由于频率簇的形成，到达同步的路径很复杂。单个等效振荡器的极限周期频率，在阵列上平均的参数将用作阵列锁定频率的估计值。该等效振荡器用于近似整个阵列，并对其应用了扰动方法。摄动法定性地捕获了外部驱动阵列的夹带特性。此分析还用于跟踪随着驱动强度变化而发生的分叉的复杂序列，并估计夹带的阈值驱动强度。