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Single crystal flake parameters of MoS 2 and MoSe 2 exfoliated using anodic bonding technique and its potential in rapid prototyping
Journal of Physics Communications ( IF 1.1 ) Pub Date : 2020-10-30 , DOI: 10.1088/2399-6528/abc296
C Malavika , R Anu Roshini , R S Surya Kanthi , E S Kannan

Rapid prototyping of devices using exfoliated Molybednum di-Sulphide (MoS 2 ) and Molybdenum di-Selenide (MoSe 2 ) requires an experimental protocol for maximizing the probability of realizing flakes with desired physical dimension and properties. In this work, we analyzed the size and thickness distribution of MoS 2 and MoSe 2 single crystalline flakes exfoliated using anodic bonding technique and established a correlation between physical dimension of the flakes and the bonding parameters. Anodic bonding was carried out by applying a fixed voltage of 200 V with a set temperature of 150 °C for four different bonding time intervals. On analyzing the flake parameters from the four anodic bonded substrates using the optical and atomic force microscopy, it is found that the probability of getting flakes with large lateral size (>200 μ m) increases as the bonding time interval is increased. Most of these large sized flakes have thicknes...

中文翻译:

阳极键合技术剥落MoS 2和MoSe 2的单晶薄片参数及其在快速成型中的潜力

使用剥离的二硫化钼(MoS 2)和二硒化钼(MoSe 2)进行设备的快速原型制作需要一个实验方案,以最大化实现具有所需物理尺寸和特性的薄片的可能性。在这项工作中,我们分析了使用阳极键合技术剥落的MoS 2和MoSe 2单晶薄片的尺寸和厚度分布,并建立了薄片物理尺寸与键合参数之间的相关性。通过在四个不同的焊接时间间隔内以200°C的固定电压和150°C的设定温度进行阳极键合。在使用光学和原子力显微镜分析来自四个阳极键合基材的薄片参数时,发现获得大横向尺寸薄片的可能性(> 随着接合时间间隔的增加,厚度增加200μm。这些大片大都是厚的。
更新日期:2020-10-30
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