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A Sequential Search Method of Dispatching Rules for Scheduling of LCD Manufacturing Systems
IEEE Transactions on Semiconductor Manufacturing ( IF 2.3 ) Pub Date : 2020-11-01 , DOI: 10.1109/tsm.2020.3029124
Je-Hun Lee , Young Kim , Yun Bae Kim , Byung-Hee Kim , Gu-Hwan Jung , Hyun-Jung Kim

A combination of dispatching rules to determine a sequence of jobs is often used for the scheduling of liquid crystal display or semiconductor manufacturing systems. Fab engineers determine weights ranging between 0 and 1 for dispatching rules, and the dispatching rules assign a value from 0 to 1 for each job. Then the weight given by the engineers and the value from each dispatching rule are multiplied and added for all rules, and the job that has the largest weighted sum is chosen to be processed on an idle machine. Hence, the weights of dispatching rules significantly affect the performance of fabs and should be determined carefully. This article proposes a sequential search method for finding a proper set of weights for dispatching rules to improve an objective value of the fab, such as increasing throughput or decreasing setup times. We use a decision tree approach and a hierarchical clustering method to efficiently search for weights in a short period of time by eliminating some sub-spaces that are less likely to have good objective values. The proposed method finds better weight sets than a random search method and a response optimization method in experiments.

中文翻译:

一种LCD制造系统调度调度规则的顺序搜索方法

确定作业序列的调度规则组合通常用于液晶显示器或半导体制造系统的调度。Fab 工程师为调度规则确定 0 到 1 之间的权重,调度规则为每个作业分配一个 0 到 1 的值。然后将工程师给定的权重和每个调度规则的值相乘并为所有规则相加,选择权重和最大的作业在空闲机器上处理。因此,调度规则的权重显着影响晶圆厂的性能,应谨慎确定。本文提出了一种顺序搜索方法,用于为调度规则找到一组合适的权重,以提高晶圆厂的客观价值,例如增加吞吐量或减少设置时间。我们使用决策树方法和层次聚类方法,通过消除一些不太可能具有良好目标值的子空间,在短时间内有效地搜索权重。所提出的方法在实验中找到了比随机搜索方法和响应优化方法更好的权重集。
更新日期:2020-11-01
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