This paper presents a stick-slip piezoelectric actuator with high consistency in performances of forward and reverse motions. It is achieved by developing an integrated stator which bonds two lead zirconate titanate ceramic plates to a symmetrical flexible hinge mechanism. The working principle of the actuator was introduced, and the stator was optimized by finite-element analysis. Experimental results showed that the proposed actuator had an excellent consistency in output performances of forward and reverse motions with or without an external load. The positioning resolution, maximum speed, and maximum loading capacity of the actuator were 0.061 µm, 2195.29 µm/s, and 1.1 N, respectively. This study provides a solution for improving the forward and reverse motion consistency of stick-slip piezoelectric actuators.

中文翻译：

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一种在正向和反向运动中具有高一致性的粘滑压电执行器

本文提出了一种在正向和反向运动性能上具有高度一致性的粘滑压电执行器。它是通过开发一个集成定子来实现的，该定子将两个锆钛酸铅陶瓷板粘合到一个对称的柔性铰链机构。介绍了执行器的工作原理，并通过有限元分析对定子进行了优化。实验结果表明，所提出的执行器在有或没有外部负载的情况下，在正向和反向运动的输出性能方面具有极好的一致性。执行器的定位分辨率、最大速度和最大负载能力分别为 0.061 µm、2195.29 µm/s 和 1.1 N。该研究为提高粘滑压电执行器的正向和反向运动一致性提供了解决方案。