Effects of the target-to-substrate distance on the microstructure and properties of TiN coatings fabricated by pulse-enhanced vacuum arc evaporation,Journal of Adhesion Science and Technology

当前位置： X-MOL 学术 › J. Adhes. Sci. Technol. › 论文详情

Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)

Effects of the target-to-substrate distance on the microstructure and properties of TiN coatings fabricated by pulse-enhanced vacuum arc evaporation
Journal of Adhesion Science and Technology ( IF 2.7 ) Pub Date : 2020-10-27 , DOI: 10.1080/01694243.2020.1836763
Yinghe Ma ₁ , Kexin Zhang ₂ , Jianguo Yang ₁ , Xiubo Tian ₃ , Chunzhi Gong ₃ , Wenjian Zheng ₁ , Yanming He ₁ , Zengliang Gao ₁ , Lianfeng Wei ₄ , Paul K. Chu ₅

Affiliation

Pulse-enhanced vacuum arc evaporation (PEVAE) is promising in surface engineering and produces coatings with better structure and properties. In PEVAE, the target-to-substrate distance (D t-s) affe...

中文翻译：