Abstract Effects of silicon on microstructure and corrosion resistance of diamond-like-carbon (DLC) film prepared on 2024 aluminum alloy by plasma-enhanced chemical vapor deposition were investigated. It was found that the content of silicon has significant influence on the microstructure and corrosion resistance of Si-DLC film. When the content of silicon is 0%, the exchange of charges on the surface of the film was facilitated because of more sp2 bonds were formed within the film. The corrosion resistance of the Si-DLC film with the addition of 2% silicon was improved because of the changes in the content of sp3 and sp2 bonds within the film. However, with the content of silicon was increased to 10%, massive nanopores were formed within the film. The corrosion resistance of Si-DLC film with the addition of 10% silicon is decreased. The optimal addition of silicon into the DLC film in order to improve the corrosion resistance in the present work is 2%. The influence mechanism of the content of silicon on corrosion resistance of Si-DLC film and the formation mechanism of nanopores within Si-DLC film are also discussed.

中文翻译：

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硅对2024铝合金等离子增强化学气相沉积类金刚石碳膜组织和耐蚀性的影响

摘要 研究了硅对等离子增强化学气相沉积法在2024铝合金上制备类金刚石碳(DLC)薄膜的微观结构和耐腐蚀性能的影响。研究发现，Si的含量对Si-DLC薄膜的微观结构和耐腐蚀性有显着影响。当硅的含量为0%时，由于膜内形成了更多的sp2键，有利于膜表面的电荷交换。由于膜内sp3和sp2键含量的变化，添加2%硅的Si-DLC膜的耐腐蚀性能得到提高。然而，随着硅含量增加到10%，薄膜内形成了大量的纳米孔。添加10%硅后Si-DLC薄膜的耐蚀性降低。在目前的工作中，为了提高耐腐蚀性，将硅添加到 DLC 膜中的最佳添加量为 2%。还讨论了硅含量对Si-DLC薄膜耐蚀性的影响机制和Si-DLC薄膜内纳米孔的形成机制。