Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms ( IF 1.4 ) Pub Date : 2020-10-27 , DOI: 10.1016/j.nimb.2020.10.008 E. Dartois , M. Chabot , T. Id Barkach , H. Rothard , P. Boduch , B. Augé , J. Duprat , J. Rojas
Most sputtering yield measurements for solid N are reported for stopping powers lower than 10 cm/molecule. We measured the sputtering yield for solid N at stopping powers, in the electronic regime, above 10 cm/molecule, extending the range of such measurements by more than an order of magnitude, using a 33 MeV 58Ni swift heavy ions beam. The evolution of the thin N ice films was monitored in-situ by mid-infrared spectroscopy (FTIR) during irradiation. As N is only weakly infrared active, and can be hardly monitored directly via an infrared absorption mode in such experiments, we use the Fabry–Perot interference fringes of the ice film to evaluate, via an optical model, the erosion of the N film as a function of ion fluence. A sputtering model including several sputtering crater shapes is developed and tested against experimental data. We derive the sputtering yield for a semi-infinite N ice film and its dependence with the ice thickness for thin film conditions, monitoring the N ice sputtering depth. We combine the results with previous measurements at lower stopping powers to derive the electronic sputtering of solid N over a large stopping power range.
中文翻译:
固态氮的电子溅射 通过快速离子
大多数溅射法测量的是固氮 报告停止功率低于10 厘米/分子。我们测量了固体N的溅射产率 在电子状态下,停止功率大于10 厘米/分子,使用33 MeV 58 Ni将此类测量范围扩大一个数量级以上快速重离子束。薄氮的演变在照射过程中,通过中红外光谱(FTIR)对冰膜进行原位监测。作为氮 只是微弱的红外活性,在这种实验中几乎无法通过红外吸收模式直接监测,我们使用冰膜的Fabry-Perot干涉条纹通过光学模型评估N的侵蚀薄膜作为离子通量的函数。开发了包括几种溅射凹坑形状的溅射模型,并针对实验数据进行了测试。我们推导出半无限大N的溅射产量 冰膜及其与冰厚度的相关性,在薄膜条件下,监测氮冰溅射深度。我们将结果与先前的测量结果以较低的制动力结合起来,得出固体氮的电子溅射 在较大的制动力范围内。