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Magnetoresistive Sensor in Two-Dimension on a 25 μm Thick Silicon Substrate for In Vivo Neuronal Measurements
ACS Sensors ( IF 8.2 ) Pub Date : 2020-10-27 , DOI: 10.1021/acssensors.0c01578 Chloé Chopin 1 , Jacob Torrejon 1 , Aurélie Solignac 1 , Claude Fermon 1 , Patrick Jendritza 2 , Pascal Fries 2, 3 , Myriam Pannetier-Lecoeur 1
ACS Sensors ( IF 8.2 ) Pub Date : 2020-10-27 , DOI: 10.1021/acssensors.0c01578 Chloé Chopin 1 , Jacob Torrejon 1 , Aurélie Solignac 1 , Claude Fermon 1 , Patrick Jendritza 2 , Pascal Fries 2, 3 , Myriam Pannetier-Lecoeur 1
Affiliation
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Neuronal electrical activity is widely studied in vivo, and the ability to measure its magnetic equivalent to obtain an undisturbed signal with both amplitude and direction information leading to neuronal signal mapping would be a promising tool for neuroscience. To provide such a tool, a probe with spin-electronics-based magnetic sensors with orthogonal axes of sensitivity for two directions of measurement is realized, thanks to a local magnetization re-orientation technique induced by Joule heating. This probe is tested under in vivo measurement conditions in the brain of an anesthetized rat. To be as close as possible to neurons and to create minimal damage during the probe’s insertion, the tip thickness has been drastically decreased using a silicon-on-insulator substrate. Our probes provide the ability to perform in vivo magnetic measurements on two orthogonal axes on a 25 μm thick silicon tip with a sensitivity of 1.7%/mT along one axis and 0.9%/mT along the perpendicular axis in the sensor plane, for a limit of detection at 1 kHz of 1.0 and 1.3 nT, respectively. These probes have been tested through a phantom study and during an in vivo experiment. The robustness and stability over one year are demonstrated.
中文翻译：
二维磁阻传感器在25μm厚的硅基板上进行体内神经元测量
体内神经元电活动已得到广泛研究，测量其磁当量以获得振幅和方向信息均不受干扰的信号（导致神经元信号映射）的能力将是神经科学的有前途的工具。为了提供这样的工具，由于焦耳加热引起的局部磁化重新定向技术，实现了具有针对两个测量方向的灵敏度正交的基于自旋电子学的磁传感器的探头。在体内测量条件下，在麻醉大鼠的大脑中测试该探针。为了尽可能接近神经元并在探针插入过程中产生最小的损害，使用绝缘体上硅衬底极大地减小了尖端厚度。我们的探头具有在25μm厚的硅片尖端上的两个正交轴上进行体内磁测量的能力，在一个传感器平面内，沿一个轴的灵敏度为1.7％/ mT，沿垂直轴的灵敏度为0.9％/ mT。在1 kHz时的检测灵敏度分别为1.0和1.3 nT 这些探针已通过幻像研究和体内实验进行了测试。证明了一年内的鲁棒性和稳定性。
更新日期：2020-11-25
中文翻译：
二维磁阻传感器在25μm厚的硅基板上进行体内神经元测量
体内神经元电活动已得到广泛研究，测量其磁当量以获得振幅和方向信息均不受干扰的信号（导致神经元信号映射）的能力将是神经科学的有前途的工具。为了提供这样的工具，由于焦耳加热引起的局部磁化重新定向技术，实现了具有针对两个测量方向的灵敏度正交的基于自旋电子学的磁传感器的探头。在体内测量条件下，在麻醉大鼠的大脑中测试该探针。为了尽可能接近神经元并在探针插入过程中产生最小的损害，使用绝缘体上硅衬底极大地减小了尖端厚度。我们的探头具有在25μm厚的硅片尖端上的两个正交轴上进行体内磁测量的能力，在一个传感器平面内，沿一个轴的灵敏度为1.7％/ mT，沿垂直轴的灵敏度为0.9％/ mT。在1 kHz时的检测灵敏度分别为1.0和1.3 nT 这些探针已通过幻像研究和体内实验进行了测试。证明了一年内的鲁棒性和稳定性。
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