Previous work has shown that optomechanical resonators are particularly well suited to the design of ultrasensitive mass sensors. They present an extremely low noise level, very high optical quality factor (Q >10 5 ), excellent integration density and can resonate both in a gaseous and liquid environment. In order to reduce the long measurement time due to their small particle-capture area, several such resonators must be integrated onto the same chip. However, bulky laboratory equipment currently used to read a single optomechanical resonator cannot be practically scaled up to a large array of transducers. It is then required to design and eventually integrate a read-out interface that can process tens to thousands of resonators. To ease the design of such a circuit, this article presents a compact analytical model of an electrostatically actuated optomechanical resonator implemented in Verilog A. The proposed model includes both the optical and mechanical behaviors, as well as optomechanical coupling and thermo-optical effect. It was simulated in the Cadence Virtuoso environment and is consistent with the measured results.

中文翻译：

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Verilog A 中光机械传感器的紧凑建模和行为仿真


先前的工作表明，光机械谐振器特别适合超灵敏质量传感器的设计。它们具有极低的噪声水平、非常高的光学品质因数 (Q >10 5 )、出色的集成密度，并且可以在气体和液体环境中谐振。为了减少由于颗粒捕获面积较小而导致的较长测量时间，必须将多个此类谐振器集成到同一芯片上。然而，目前用于读取单个光机械谐振器的笨重实验室设备实际上无法扩展到大型换能器阵列。然后需要设计并最终集成一个可以处理数十到数千个谐振器的读出接口。为了简化此类电路的设计，本文提出了在 Verilog A 中实现的静电驱动光机械谐振器的紧凑分析模型。所提出的模型包括光学和机械行为，以及光机械耦合和热光效应。在Cadence Virtuoso环境下进行仿真，与实测结果一致。