Background

To avoid the risk of increase in the rate of human infection is a big challenge for healthcare staffs during the treatment of patients affected from corona virus disease-2019 (COVID-19). This work is intended to save COVID-19-infected patients from conveyed hazardous volatile gases (VOCs) by the gas stream. The VOCs are generally generated from the pathways of medical respiratory devices.

Method

Here, we present a surface acoustic wave-based sensor device for sensing dichloromethane (DCM) gas that can be connected with a gas pathway system used in medical devices. Dichloromethane is a volatile organic compound. Single- (polyisobutylene, PIB) and multi- (polyisobutylene/silicon nitride, PIB/Si₃N₄) surface acoustic wave-based sensors are designed on LiNbO₃ piezoelectric substrate. The designed models patterned with interdigitated transducer (IDT) aluminum (Al) electrodes are used to analyze gas sensing behavior for dichloromethane (CH₂Cl₂, DCM) gas.

Results

The studies for DCM gas sensing are carried out for single- and multi-layer models using COMSOL Multi-physics software. The resonant frequency and displacement are also observed for 100 ppm gas concentration of DCM at room temperature. It has been found that multi-layer designed model shows higher sensitivity as compared to single layer (PIB/LiNbO₃) model on exposing DCM gas.

Conclusion

The estimation of various parameters observed by the proposed module is also explained. It is observed that the sensitivity of sensor for detection of VOCs (generated in gas pathways in medical devices) is best suited in the present crisis of COVID-19 pandemic.

中文翻译：

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基于声表面波的COVID-19二氯甲烷气体传感传感器的设计性能和频率响应分析

背景

在治疗受到2019年日冕病毒病（COVID-19）影响的患者期间，避免医护人员面临的一大挑战是要避免增加人类感染率的风险。这项工作旨在通过气流将COVID-19感染的患者从输送的有害挥发性气体（VOC）中拯救出来。VOC通常是从医疗呼吸设备的路径中产生的。

方法

在这里，我们介绍了一种基于声表面波的传感器设备，用于传感二氯甲烷（DCM）气体，该气体可以与医疗设备中使用的气体通道系统连接。二氯甲烷是挥发性有机化合物。在LiNbO ₃压电基板上设计了单（聚异丁烯，PIB）和多（聚异丁烯/氮化硅，PIB / Si ₃ N ₄）表面声波传感器。带有叉指式换能器（IDT）铝（Al）电极的图案化设计模型用于分析二氯甲烷（CH ₂ Cl ₂，DCM）气体的气体传感行为。

结果

使用COMSOL Multi-physics软件对单层和多层模型进行DCM气体传感研究。在室温下，对于100 ppm的DCM气体浓度，也观察到共振频率和位移。已经发现，与单层（PIB / LiNbO ₃）模型相比，多层设计模型在暴露DCM气体时显示出更高的灵敏度。

结论

还解释了所提出的模块所观察到的各种参数的估计。可以看出，用于检测VOC（在医疗设备的气体路径中生成）的传感器的灵敏度最适合当前的COVID-19大流行危机。