The powder aerosol deposition (PAD) method is a well-known process to fabricate dense layers at room temperature directly from the powder. It is particularly suitable for the deposition of ceramic materials. Compared to these, the use of metal powders (here iron), which are significantly more ductile and have a higher density than typical ceramic powders, has not yet been investigated in detail for PAD. In the first step of this work, the iron powder is characterized by scanning electron microscopy and x-ray diffraction. In order to improve the deposition behavior, the influence of heat treatment on the crystallite and the particle size of the iron powder is investigated. It is shown that the crystallite size of iron powders is reduced down to a nanocrystalline size during deposition. The magnetic properties of the iron powder as well as the layers are investigated by means of coercive field development. Although the initial coercivity raises after deposition, potential applications for flux guiding in microelectronic sensors and devices are feasible. In the second step, thin metal layers (iron) and ceramics (aluminum oxide) are deposited alternatingly to produce iron–alumina multilayer structures.

中文翻译：

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通过粉末气溶胶沉积法生产的铁涂层增厚的粉末处理和铁-氧化铝多层结构的形成

粉末气溶胶沉积 (PAD) 方法是一种众所周知的工艺，可在室温下直接从粉末制造致密层。它特别适用于陶瓷材料的沉积。与这些相比，尚未对 PAD 使用比典型的陶瓷粉末更具延展性且密度更高的金属粉末（此处为铁）进行详细研究。在这项工作的第一步中，铁粉通过扫描电子显微镜和 X 射线衍射进行表征。为了改善沉积行为，研究了热处理对铁粉晶粒和粒径的影响。结果表明，在沉积过程中，铁粉的微晶尺寸减小到纳米晶尺寸。通过矫顽场发展研究铁粉以及层的磁性。尽管初始矫顽力在沉积后升高，但在微电子传感器和设备中磁通引导的潜在应用是可行的。第二步，交替沉积薄金属层（铁）和陶瓷（氧化铝）以产生铁-氧化铝多层结构。