In micro-/nano-scale, multi-material three-dimensional (3D), structuring has been a major research area for making various applications. To overcome dimensional and material limitations, several hybrid processes have been proposed. The hybrid processes were performed in the same or different numerically controlled stages. If the stages differed, the substrate was moved and locked to the stage before fabrication. During the locking, alignment error occurred. This error became problematic because this significantly compromised the quality of final structures. Here, an alignment method for a hybrid process consisted of a focused ion beam milling, aerodynamically focused nanoparticle printing, and micro-machining was developed. Two sets of collinear marks were placed at the edges of the substrate. Rotational and translational errors were calculated and compensated using the marks. Processes having different scales were bridged through this alignment method. Various materials were utilized, and accuracy was less than 50 nm when the length of the substrate was less than 13 mm. The alignment method was employed to fabricate a V-shaped structure and step-shaped structure using polymer, ceramic, and metal.

在微米/纳米级的多材料三维（3D）中，结构化已成为进行各种应用程序的主要研究领域。为了克服尺寸和材料限制，已经提出了几种混合工艺。混合过程在相同或不同的数控阶段进行。如果平台不同，则在制造之前将基板移动并锁定到平台。在锁定期间，发生对齐错误。该错误成为问题，因为这大大损害了最终结构的质量。在这里，开发了一种用于混合工艺的对准方法，该方法包括聚焦离子束铣削，气动聚焦纳米颗粒印刷和微加工。两组共线标记放置在基板的边缘。计算旋转和平移误差，并使用标记进行补偿。通过这种比对方法，可以将具有不同规模的工艺桥接起来。利用各种材料，并且当基板的长度小于13mm时，精度小于50nm。使用对准方法来使用聚合物，陶瓷和金属来制造V形结构和阶梯形结构。