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Printed, Fully Metal Oxide, Capacitive Humidity Sensors Using Conductive Indium Tin Oxide Inks
ACS Applied Electronic Materials ( IF 4.3 ) Pub Date : 2020-10-22 , DOI: 10.1021/acsaelm.0c00660 Jack R. McGhee 1 , Jagdeep S. Sagu 2 , Darren J. Southee 1 , Peter. S. A. Evans 1, 2 , K. G. Upul Wijayantha 2
ACS Applied Electronic Materials ( IF 4.3 ) Pub Date : 2020-10-22 , DOI: 10.1021/acsaelm.0c00660 Jack R. McGhee 1 , Jagdeep S. Sagu 2 , Darren J. Southee 1 , Peter. S. A. Evans 1, 2 , K. G. Upul Wijayantha 2
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In this research, fully metal oxide, capacitive humidity sensors for printed electronic applications have been designed and fabricated through the development of conductive indium tin oxide and dielectric aluminum oxide inks for the screen-printing process. Sensors were printed in a parallel plate configuration in 4 and 9 cm2 conductive plate areas. Typically, commercially available discrete humidity sensors have a sensitivity in the range of 0.2–0.5 pF/RH%, whereas the printed humidity sensors presented in this paper have sensitivities of 0.85–7.76 pF/RH% depending on the sensor size, allowing for customizable properties. Response times were measured using a weighted average and found to be 21.4 s on average and recovery times were 4.8 s on average. The sensing performance was highly linear (R2 > 0.97) for sensors of all sizes across the measured humidity range of 5–95%. Impedance spectroscopy was used to determine the sensing mechanism, and the mechanism was simulated and matched with experimental data. The sensing mechanism analysis shows that the sensing is primarily dictated by alumina at a lower relative humidity. The ITO contributes through increasing the ionic conductivity at a higher relative humidity, contributing to the high linearity of the sensor.
中文翻译：
使用导电铟锡氧化物油墨的印刷全金属氧化物电容式湿度传感器
在这项研究中，通过开发用于丝网印刷工艺的导电铟锡氧化物和介电氧化铝油墨，设计和制造了用于印刷电子应用的全金属氧化物电容式湿度传感器。传感器以平行板配置印刷在4和9 cm 2的导电板区域中。通常，市售的离散湿度传感器的灵敏度在0.2–0.5 pF / RH％的范围内，而本文中介绍的印刷湿度传感器的灵敏度在0.85–7.76 pF / RH％的范围内（取决于传感器的尺寸），可以进行自定义属性。使用加权平均值测量响应时间，发现平均时间为21.4 s，恢复时间平均为4.8 s。传感性能是高度线性的（R2 > 0.97），适用于在5–95％的测量湿度范围内的各种尺寸的传感器。用阻抗谱确定了传感机理，并对该机理进行了仿真并与实验数据进行了比较。感应机理分析表明，感应主要由相对湿度较低的氧化铝决定。ITO通过在较高的相对湿度下增加离子电导率而起作用，从而有助于传感器的高线性度。
更新日期：2020-11-25
中文翻译：
使用导电铟锡氧化物油墨的印刷全金属氧化物电容式湿度传感器
在这项研究中，通过开发用于丝网印刷工艺的导电铟锡氧化物和介电氧化铝油墨，设计和制造了用于印刷电子应用的全金属氧化物电容式湿度传感器。传感器以平行板配置印刷在4和9 cm 2的导电板区域中。通常，市售的离散湿度传感器的灵敏度在0.2–0.5 pF / RH％的范围内，而本文中介绍的印刷湿度传感器的灵敏度在0.85–7.76 pF / RH％的范围内（取决于传感器的尺寸），可以进行自定义属性。使用加权平均值测量响应时间，发现平均时间为21.4 s，恢复时间平均为4.8 s。传感性能是高度线性的（R2 > 0.97），适用于在5–95％的测量湿度范围内的各种尺寸的传感器。用阻抗谱确定了传感机理，并对该机理进行了仿真并与实验数据进行了比较。感应机理分析表明，感应主要由相对湿度较低的氧化铝决定。ITO通过在较高的相对湿度下增加离子电导率而起作用，从而有助于传感器的高线性度。
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