Laser Ablation and Ni/Cu Plating Approach for Tunnel Oxide Passivated Contacts Solar Cells with Variate Polysilicon Layer Thickness: Gains and Possibilities in Comparison to Screen Printing,Physica Status Solidi (A) - Applications and Materials Science

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Laser Ablation and Ni/Cu Plating Approach for Tunnel Oxide Passivated Contacts Solar Cells with Variate Polysilicon Layer Thickness: Gains and Possibilities in Comparison to Screen Printing
Physica Status Solidi (A) - Applications and Materials Science Pub Date : 2020-10-21 , DOI: 10.1002/pssa.202000474
Varun Arya ₁ , Bernd Steinhauser ₁ , Benjamin Gruebel ₁ , Christian Schmiga ₁ , Norbert Bay ₂ , Damian Brunner ₂ , Michael Passig ₂ , Andreas A. Brand ₁ , Sven Kluska ₁ , Jan Nekarda ₁

Affiliation

Herein, an alternative approach of metallization on tunnel oxide passivated contacts (TOPCon) devices, through the method of localized laser ablation and nickel–copper plating, is presented. The method is demonstrated to be a viable and effective alternative, yielding better performance and results than the conventional screen‐printed contacts. The laser ablation process, with a lower increase in recombination current as compared to screen printing, proves to be a far less damaging process than the latter. TOPCon solar cells, fabricated and compared using the two metallization approaches, show a substantial improvement in an absolute power efficiency of ≈1%. Due to the highly superficial nature of damage with the optimized laser parameters, it enables the reduction of the poly‐Si layer thickness down to 70 nm in the TOPCon stack and also a high cell conversion efficiency of 22%. This allows for a substantial reduction in ownership costs of the final device without compromising on performance, making TOPCon cells with plated contacts an attractive technological upgrade for industrial‐level production following the passivated emitter rear contact cell technology.

中文翻译：

具有可变多晶硅层厚度的隧道氧化物钝化接触式太阳能电池的激光烧蚀和Ni / Cu电镀方法：与丝网印刷相比的收益和可能性

本文介绍了通过局部激光烧蚀和镍铜镀层的方法在隧道氧化物钝化接触（TOPCon）器件上进行金属化的另一种方法。该方法被证明是一种可行且有效的替代方法，与传统的丝网印刷触点相比，具有更好的性能和结果。与丝网印刷相比，激光烧蚀工艺的复合电流增加幅度较小，与后者相比，其破坏性要小得多。使用两种金属化方法制造和比较的TOPCon太阳能电池在绝对功率效率方面达到了1％的显着提高。由于采用优化的激光参数，损坏具有高度表面的性质，它可以将TOPCon叠层中的多晶硅层厚度减小至70 nm，并且电池转换效率高达22％。这可以在不影响性能的情况下大幅降低最终设备的拥有成本，使具有镀层触点的TOPCon电池成为继钝化发射极后接触电池技术之后工业级生产的一项有吸引力的技术升级。

更新日期：2020-12-18

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