Zernike phase‐contrast full‐field transmission X‐ray nanotomography for 400 micrometre‐sized samples,Journal of Synchrotron Radiation

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Zernike phase‐contrast full‐field transmission X‐ray nanotomography for 400 micrometre‐sized samples
Journal of Synchrotron Radiation ( IF 2.4 ) Pub Date : 2020-10-21 , DOI: 10.1107/s160057752001245x
Jae Yeon Park ₁ , Yeseul Kim ₂ , Sangsul Lee ₁ , Jun Lim ₁

Affiliation

Full‐field X‐ray nanotomography based on a Fresnel zone plate offers a promising and intuitive approach to acquire high‐quality phase‐contrast images with a spatial resolution of tens of nanometres, and is applicable to both synchrotron radiation and laboratory sources. However, its small field of view (FOV) of tens of micrometres provides limited volume information, which primarily limits its application fields. This work proposes a method for expanding the FOV as the diameter of the objective zone plate, which provides a 400 µm FOV at below 500 nm resolution with Zernike phase contrast. General applications of large‐volume nanotomography are demonstrated in integrated circuit microchips and Artemia cysts. This method can be useful for imaging/analyzing industrial and biological samples where bulk properties are important or the sample is difficult to section.

中文翻译：

用于 400 微米样品的 Zernike 相衬全场透射 X 射线纳米断层扫描

基于菲涅耳波带片的全场 X 射线纳米断层扫描提供了一种有前景且直观的方法来获得具有数十纳米空间分辨率的高质量相衬图像，并且适用于同步辐射和实验室源。然而，其几十微米的小视场（FOV）提供的体积信息有限，这主要限制了其应用领域。这项工作提出了一种将 FOV 扩展为物镜波带板直径的方法，该方法在低于 500 nm 的分辨率下提供了 400 µm 的 FOV，并具有 Zernike 相位对比。大体积纳米断层扫描的一般应用在集成电路微芯片和卤虫包囊中得到了证明。

更新日期：2020-11-06

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