Bistable elements are candidate structures for the evolving field of MEMS-based no-power event-driven sensors. In this paper, we present a strategy for producing bistable elements and investigate two compatible bilayer material systems for their realization using MEMS technology. Both bilayer systems leverage thermally-grown silicon dioxide as the principal stress-producing layer and a second material (either polyimide or aluminum) as the main structural layer. Arrays of buckled circular diaphragms, ranging in diameter from 100 μ m to 700 μ m in 50 μ m increments, were fabricated and their performances were compared to modeled and FEA-simulated results. In all cases, the diaphragms buckled when DRIE-released as expected, and their buckled experimental heights were within 9.1% of the theory and 1.8% of the FEA prediction. Interestingly, the smaller diameter structures exhibited a directional bias which we investigate and forecast using FEA. These bistable mechan...

中文翻译：

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弯曲的MEMS膜片的双稳态研究

双稳态元件是基于MEMS的无功率事件驱动传感器不断发展的领域的候选结构。在本文中，我们提出了一种生产双稳态元件的策略，并研究了使用MEMS技术实现的两个兼容的双层材料系统。两种双层系统都利用热生长的二氧化硅作为主要的应力产生层，并利用第二种材料（聚酰亚胺或铝）作为主要的结构层。制作了直径从100μm到700μm（以50μm为增量）的弯曲圆形膜片阵列，并将其性能与建模和FEA仿真结果进行了比较。在所有情况下，按预期方式释放DRIE时，膜片都会发生弯曲，弯曲的实验高度在理论值的9.1％之内，在FEA预测值的1.8％之内。有趣的是 直径较小的结构表现出方向性偏差，我们使用FEA进行调查和预测。这些双稳态机械...