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Advances in color-converted micro-LED arrays
Japanese Journal of Applied Physics ( IF 1.5 ) Pub Date : 2020-10-15 , DOI: 10.35848/1347-4065/abba0f
Kai-Ling Liang , Wei-Hung Kuo , Hui-Tang Shen , Pei-Wen Yu , Yen-Hsiang Fang , Chien-Chung Lin

The development of a full-color micro-display at the Industrial Technology Research Institute (ITRI) was reviewed in this study. The blue micro-display with 960 × 540 pixel arrays and 1984 PPI resolution is demonstrated on a CMOS active matrix addressing circuit. Different methods of fabricating such a micro-panel are developed to overcome the limitation in mass transfer. For the device size ranging from 5–100 micrometers, low-current external quantum efficiency of 10%–14% can be obtained. To achieve a full-color scheme, we adapt color-conversion layer design and use colloidal quantum dots as the illuminating material. A full-color array on a transparent substrate of 170 PPI resolution was demonstrated with a large-area blue LED backlight. The red and green pixels were fabricated by a photolithography process and had a size of30 μ m. The FWHM of 21 and 28 nm and the quantum yield of 28% and 41% for the green and red pixels, respectively, were measured by a 2D spectroradio...

中文翻译:

色彩转换的微型LED阵列的进展

这项研究回顾了工业技术研究院(ITRI)全彩色微显示器的开发。在CMOS有源矩阵寻址电路上演示了具有960×540像素阵列和1984 PPI分辨率的蓝色微型显示器。开发了制造这种微面板的不同方法来克服传质的限制。对于尺寸为5-100微米的器件,可以获得10%-14%的低电流外部量子效率。为了实现全色方案,我们采用了颜色转换层设计,并使用胶体量子点作为照明材料。用大面积蓝色LED背光灯演示了170 PPI分辨率的透明基板上的全色阵列。红色和绿色像素通过光刻工艺制造,尺寸为30μm。
更新日期:2020-10-19
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