The pressure sensors can convert external pressure or mechanical deformation into electrical power and signal, which cannot only detect pressure or strain changes but also harvest energy as a self-powered sensor. This study aims to develop a self-powered flexible pressure sensor based on regular nanopatterned polymer films.,In this paper, the self-powered flexible pressure sensor is mainly composed of two nanopatterned polymer films and one conductive electrode layer between them, which is a sandwich structure. The regular nanostructures increase the film roughness and contact area to enhance the friction effect. To enhance the performance of the pressure sensor, different nanostructures on soft polymer sensitive layers are fabricated using UV nanoimprint lithography to generate more triboelectric charges.,Finally, the self-powered flexible pressure sensor is prepared, which consists of sub-200 nm resolution regular nanostructures on the surface of the elastic layer and an indium tin oxide electrode thin film. By converting the friction mechanical energy into electrical power, a maximum power of 423.8 mW/m2 and the sensitivity of 0.8 V/kPa at a frequency of 5 Hz are obtained, which proves the excellent sensing performance of the sensor.,The acquired electrical power and pressure signal by the sensor would be processed in the signal process circuit, which is capable of immediately and sustainably driving the highly integrated self-powered sensor system. Results of the experiments show that this new pressure sensor is a potential method for personal pressure monitoring, featured as being wearable, cost-effective, non-invasive and user-friendly.

中文翻译：

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基于纳米图案聚合物薄膜的自供电柔性压力传感器

压力传感器可以将外部压力或机械变形转化为电能和信号，不仅可以检测压力或应变变化，还可以作为自供电传感器收集能量。本研究旨在开发一种基于规则纳米图案聚合物薄膜的自供电柔性压力传感器。,本文中，自供电柔性压力传感器主要由两层纳米图案聚合物薄膜和它们之间的一个导电电极层组成，这是一个三明治结构。规则的纳米结构增加了薄膜的粗糙度和接触面积，以增强摩擦效果。为了提高压力传感器的性能，使用紫外纳米压印光刻技术在软聚合物敏感层上制造不同的纳米结构，以产生更多的摩擦电荷。，最后，制备自供电柔性压力传感器，其由弹性层表面亚200nm分辨率规则纳米结构和氧化铟锡电极薄膜组成。通过将摩擦机械能转化为电能，在5Hz频率下获得了423.8 mW/m2的最大功率和0.8 V/kPa的灵敏度，证明了传感器优异的传感性能。,获得的电能传感器发出的压力信号将在信号处理电路中进行处理，从而能够立即、持续地驱动高度集成的自供电传感器系统。实验结果表明，这种新型压力传感器是一种潜在的个人压力监测方法，具有可穿戴、经济高效、非侵入性和用户友好的特点。