Two-dimensional spatial measurements of magnetic field and plasma parameters have been performed in conventional magnetron DC discharges during the formation of metallic nanoparticles. Correlations between the electron density and temperature distributions, and the magnetic field geometry and strength have been established. A sharp increase of the plasma potential is found on the edge of the last magnetic arch followed by a decrease towards the anode plate and edges. It is shown that the spatial variation of the plasma potential is at the origin of a potential well that can trap negatively charged nanoparticles.

中文翻译：

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存在纳米颗粒时常规磁控管放电中等离子体参数的空间分布

磁场和等离子体参数的二维空间测量已在金属纳米颗粒形成期间在常规磁控管直流放电中进行。已经建立了电子密度和温度分布以及磁场几何形状和强度之间的相关性。在最后一个磁拱的边缘发现等离子体电势急剧增加，随后向阳极板和边缘降低。结果表明，等离子体电位的空间变化位于可以捕获带负电纳米粒子的势阱的起源。