Humidity sensor module fabricated using acrylic resin and PSD (position sensitivity detector). In order to directly convert to electrical signal from output signal of optical humidity sensor system consisted of a light source, a gap, and an acrylic resin film coated on PSD. For the purpose of convert to 4–20 mA signal from current change according to the relative humidity (RH) integrated amplification of output current and 4–20 mA module by a 0.8 µm analog mixed CMOS process. Using the fabricated humidity sensor and Pt-100 accomplished one-bodied temperature-humidity sensor module and tested. The experimental results show that the sensitivity and linearity of sensor get better, while the thickness of the acrylic resin film is increased. The linearity of RH-current characteristics is good in the measuring range from 10 to 90% at 15 °C. The sensitivity of this sensor is 6.52–7.34μA/% RH. Furthermore, the current at PSD is measured with the rise and drop of RH, and the four times repetition is also recorded, which all demonstrate the good stability and repeatability of our proposed structure.

中文翻译：

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使用丙烯酸树脂和位置灵敏度检测器的宽灵敏度光学湿度模块

使用丙烯酸树脂和 PSD（位置灵敏度检测器）制造的湿度传感器模块。为了将光学湿度传感器系统的输出信号直接转换为电信号，该系统由光源、间隙和涂覆在PSD上的丙烯酸树脂薄膜组成。用于根据输出电流和 4-20 mA 模块的相对湿度 (RH) 集成放大通过 0.8 µm 模拟混合 CMOS 工艺将电流变化转换为 4-20 mA 信号。使用制作的湿度传感器和 Pt-100 完成一体式温湿度传感器模块并进行测试。实验结果表明，增加了丙烯酸树脂薄膜的厚度，传感器的灵敏度和线性度得到了改善。RH-电流特性的线性度在 15 °C 时为 10% 至 90% 的测量范围内良好。该传感器的灵敏度为 6.52–7.34μA/% RH。此外，随着RH的上升和下降测量PSD处的电流，并记录了四次重复，这都证明了我们提出的结构具有良好的稳定性和可重复性。