The change in surface morphology of an amorphous TiO 2 protective film coated on a Mo/Si multilayer of an extreme ultraviolet (EUV) light collector mirror has been investigated. After long-time operation of an EUV light source, many pinholes of about 10 nm diameter were observed on the protective TiO 2 film surface. Accelerated aging tests with thin film samples that simulated surface conditions on the collector mirror suggest that crystallization of the protective film induced by Sn implantation is the main cause of the formation of the observed pinholes.

中文翻译：

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集光镜上保护膜的表面形态变化与EUV光源中激光产生的等离子体发射的Sn的注入有关

已经研究了涂覆在极紫外（EUV）集光镜的Mo / Si多层膜上的非晶TiO 2保护膜的表面形态变化。在EUV光源长时间运行后，在TiO 2保护膜表面上观察到许多直径约10 nm的针孔。薄膜样品的加速老化测试（模拟了集电极镜上的表面状况）表明，由锡注入引起的保护膜结晶是形成观察到的针孔的主要原因。