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Highly Sensitive P(VDF-TrFE)/BTO Nanofiber-Based Pressure Sensor with Dense Stress Concentration Microstructures
ACS Applied Polymer Materials ( IF 4.4 ) Pub Date : 2020-10-15 , DOI: 10.1021/acsapm.0c00411 Xiaohe Hu 1 , Yonggang Jiang 1 , Zhiqiang Ma 1 , Qipei He 1 , Yupeng He 2 , Tianfeng Zhou 2 , Deyuan Zhang 1
ACS Applied Polymer Materials ( IF 4.4 ) Pub Date : 2020-10-15 , DOI: 10.1021/acsapm.0c00411 Xiaohe Hu 1 , Yonggang Jiang 1 , Zhiqiang Ma 1 , Qipei He 1 , Yupeng He 2 , Tianfeng Zhou 2 , Deyuan Zhang 1
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Flexible pressure sensors demonstrate promising potential in human–machine interfaces, wearable devices, and implantable electronics. In this study, a highly sensitive pressure sensor was developed, comprising a polyimide substrate with a high-density micropyramid array (HD-μPA), an active piezoelectric component of poly(vinylidenefluoride-co-trifluoroethylene) [P(VDF-TrFE)]/barium titanate (BTO) nanofiber mat, and silver nanowires (AgNWs) as the top electrode. A mold for imprinting of polyimide HD-μPA was fabricated by an ultraprecision microgroove fly cutting process, which can obtain μPA with a higher density than the mold fabricated by anisotropic wet etching of silicon. The piezoelectric output of the HD-μPA-based pressure sensor was approximately 1.7 times higher than that of the sensor with a flat substrate. The improved sensitivity of the sensor was attributed to the stress concentration effect of HD-μPA and elastic modulus mismatch between the polyimide HD-μPA and the P(VDF-TrFE)/BTO nanofiber mat. A pressure detection limit as low as 0.6 Pa was achieved for the HD-μPA-based pressure sensor, showing many potential applications in flexible electronics.
中文翻译：
具有密集应力集中微结构的高灵敏度P（VDF-TrFE）/ BTO纳米纤维基压力传感器
柔性压力传感器在人机界面，可穿戴设备和可植入电子设备中显示出广阔的发展潜力。在这项研究中，开发了一种高度灵敏的压力传感器，该传感器包括具有高密度微金字塔阵列（HD-μPA）的聚酰亚胺基板，聚偏二氟乙烯共聚物的活性压电成分。-三氟乙烯）[P（VDF-TrFE）] /钛酸钡（BTO）纳米纤维垫，以及银纳米线（AgNWs）作为顶部电极。通过超精密微槽飞刀切割工艺制造了用于压印聚酰亚胺HD-μPA的模具，与通过各向异性湿法刻蚀硅制得的模具相比，该模具可以获得更高密度的μPA。基于HD-μPA的压力传感器的压电输出大约是具有平坦基板的传感器的压电输出的1.7倍。传感器灵敏度的提高归因于HD-μPA的应力集中效应以及聚酰亚胺HD-μPA与P（VDF-TrFE）/ BTO纳米纤维垫之间的弹性模量不匹配。基于HD-μPA的压力传感器实现了低至0.6 Pa的压力检测极限，显示了在柔性电子产品中的许多潜在应用。
更新日期：2020-11-13
中文翻译：
具有密集应力集中微结构的高灵敏度P（VDF-TrFE）/ BTO纳米纤维基压力传感器
柔性压力传感器在人机界面，可穿戴设备和可植入电子设备中显示出广阔的发展潜力。在这项研究中，开发了一种高度灵敏的压力传感器，该传感器包括具有高密度微金字塔阵列（HD-μPA）的聚酰亚胺基板，聚偏二氟乙烯共聚物的活性压电成分。-三氟乙烯）[P（VDF-TrFE）] /钛酸钡（BTO）纳米纤维垫，以及银纳米线（AgNWs）作为顶部电极。通过超精密微槽飞刀切割工艺制造了用于压印聚酰亚胺HD-μPA的模具，与通过各向异性湿法刻蚀硅制得的模具相比，该模具可以获得更高密度的μPA。基于HD-μPA的压力传感器的压电输出大约是具有平坦基板的传感器的压电输出的1.7倍。传感器灵敏度的提高归因于HD-μPA的应力集中效应以及聚酰亚胺HD-μPA与P（VDF-TrFE）/ BTO纳米纤维垫之间的弹性模量不匹配。基于HD-μPA的压力传感器实现了低至0.6 Pa的压力检测极限，显示了在柔性电子产品中的许多潜在应用。
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