Abstract Fourier ptychographic microscopy (FPM) is a promising phase retrieval algorithm that does not need interferometry. Recently, reflective FPM has been highlighted as a measuring method for surface inspection in the industry, but using it is challenging because of the limited speed of the conventional misalignment correction methods. Here, we propose a new misalignment correction method to overcome this limitation by using additional 4f imaging and modifying the conventional misalignment method. As a result, about 1 mm2 (8095 × 8095) wide field of view image was reconstructed within 980.3 s.

中文翻译：

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用于全视场重建的反射傅立叶 ptychographic 显微镜中的快速错位校正方法

摘要 傅里叶 ptychographic 显微镜 (FPM) 是一种很有前途的相位检索算法，不需要干涉测量。最近，反射式 FPM 作为表面检测的一种测量方法在业界备受关注，但由于传统未对准校正方法的速度有限，因此使用它具有挑战性。在这里，我们提出了一种新的错位校正方法，通过使用额外的 4f 成像和修改传统的错位方法来克服这一限制。结果，在 980.3 秒内重建了约 1 mm2 (8095 × 8095) 的宽视野图像。